Sublimation Growth of 50mm Diameter SiC Wafers |
|
| Journal | Materials Science Forum (Volumes 264 - 268) |
|---|---|
| Volume | Silicon Carbide, III-Nitrides and Related Materials |
| Edited by | G. Pensl, H. Morkoç, B. Monemar and E. Janzén |
| Pages | 13-16 |
| DOI | 10.4028/www.scientific.net/MSF.264-268.13 |
| Online since | February, 1998 |
| Authors | Adrian R. Powell, Shao Ping Wang, G. Fechko, George R. Brandes |
| Keywords | Single Crystal Expansion, Sublimation Growth, Substrate |
| Full Paper |
Get the full paper by clicking here
|