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Sublimation Growth of 50mm Diameter SiC Wafers

Journal Materials Science Forum (Volumes 264 - 268)
Volume Silicon Carbide, III-Nitrides and Related Materials
Edited by G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages 13-16
DOI 10.4028/www.scientific.net/MSF.264-268.13
Online since February, 1998
Authors Adrian R. Powell, Shao Ping Wang, G. Fechko, George R. Brandes
Keywords Single Crystal Expansion, Sublimation Growth, Substrate
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