Paper Title:
Nanometre Scale Reactive Ion Etching of GaN Epilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
1403-1406
DOI
10.4028/www.scientific.net/MSF.264-268.1403
Citation
D. Coquillat, S.K. Murad, A. Ribayrol, C.J.M. Smith, R.M. De La Rue, C. D.W. Wilkinson, O. Briot, R.L. Aulombard, "Nanometre Scale Reactive Ion Etching of GaN Epilayers", Materials Science Forum, Vols. 264-268, pp. 1403-1406, 1998
Online since
February 1998
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.