Paper Title:
A New Radiation Heated 4 Inch LPCVD System for β-SiC Heteroepitaxy
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
171-174
DOI
10.4028/www.scientific.net/MSF.264-268.171
Citation
H. Möller, W. Legner, G. Krötz, "A New Radiation Heated 4 Inch LPCVD System for β-SiC Heteroepitaxy", Materials Science Forum, Vols. 264-268, pp. 171-174, 1998
Online since
February 1998
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Price
$32.00
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