Paper Title:
Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
179-182
DOI
10.4028/www.scientific.net/MSF.264-268.179
Citation
C.-H. Wu, A.J. Fleischman, C. A. Zorman, M. Mehregany, "Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence", Materials Science Forum, Vols. 264-268, pp. 179-182, 1998
Online since
February 1998
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Price
$32.00
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