Paper Title:
Growth of Epitaxial Cubic SiC Thin Films Using Single Source Precursors
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
187-190
DOI
10.4028/www.scientific.net/MSF.264-268.187
Citation
J. H. Boo, S. B. Lee, S.A. Ustin, W. Ho, H.P. Maruska, P.E. Norris, I. H. Kim, C. Sung, "Growth of Epitaxial Cubic SiC Thin Films Using Single Source Precursors", Materials Science Forum, Vols. 264-268, pp. 187-190, 1998
Online since
February 1998
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Price
$32.00
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