Paper Title:
Crystallinity of 3C-SiC Films Grown on Si Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
191-194
DOI
10.4028/www.scientific.net/MSF.264-268.191
Citation
K. Yagi, H. Nagasawa, "Crystallinity of 3C-SiC Films Grown on Si Substrates", Materials Science Forum, Vols. 264-268, pp. 191-194, 1998
Online since
February 1998
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Price
$32.00
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