Paper Title:
Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
207-210
DOI
10.4028/www.scientific.net/MSF.264-268.207
Citation
T. Takahashi, Y. Ishida, H. Okumura, S. Yoshida, T. Sekigawa, "Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates", Materials Science Forum, Vols. 264-268, pp. 207-210, 1998
Online since
February 1998
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