Paper Title:
Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
219-222
DOI
10.4028/www.scientific.net/MSF.264-268.219
Citation
R. Scholz, U.M. Gösele, F. Wischmeyer, E. Niemann, "Formation and Prevention of Micropipes and Voids in CVD Carbonization Experiments on (100) Silicon", Materials Science Forum, Vols. 264-268, pp. 219-222, 1998
Online since
February 1998
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Price
$32.00
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