Paper Title:
Heteroepitaxial Growth of SiC on Si by Gas Source MBE with Silacyclobutane
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
239-242
DOI
10.4028/www.scientific.net/MSF.264-268.239
Citation
J. M. Chen, A.J. Steckl, M. J. Loboda, "Heteroepitaxial Growth of SiC on Si by Gas Source MBE with Silacyclobutane", Materials Science Forum, Vols. 264-268, pp. 239-242, 1998
Online since
February 1998
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Price
$32.00
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