Paper Title:
Heteroepitaxial Growth of 3C-SiC on Surface-Structure-Controlled MBE Layer by Low-Pressure CVD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
243-246
DOI
10.4028/www.scientific.net/MSF.264-268.243
Citation
M. Uchida, M. Deguchi, K. Takahashi, M. Kitabatake, M. Kitagawa, "Heteroepitaxial Growth of 3C-SiC on Surface-Structure-Controlled MBE Layer by Low-Pressure CVD", Materials Science Forum, Vols. 264-268, pp. 243-246, 1998
Online since
February 1998
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