Influence of the Growth Direction and Polytype on the Stacking Fault Generation in α-SiC |
| Journal |
Materials Science Forum (Volumes 264 - 268) |
| Volume |
Silicon Carbide, III-Nitrides and Related Materials |
| Edited by |
G. Pensl, H. Morkoç, B. Monemar and E. Janzén |
| Pages |
25-28 |
| DOI |
10.4028/www.scientific.net/MSF.264-268.25 |
| Online since |
February, 1998 |
| Authors |
J. Takahashi,
Noboru Ohtani,
Masakazu Katsuno,
S. Shinoyama
|
| Keywords |
Growth Direction, Modified-Lely Method, Polytype, Stacking Fault |
| Full Paper |
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