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Influence of the Growth Direction and Polytype on the Stacking Fault Generation in α-SiC

Journal Materials Science Forum (Volumes 264 - 268)
Volume Silicon Carbide, III-Nitrides and Related Materials
Edited by G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages 25-28
DOI 10.4028/www.scientific.net/MSF.264-268.25
Online since February, 1998
Authors J. Takahashi, Noboru Ohtani, Masakazu Katsuno, S. Shinoyama
Keywords Growth Direction, Modified-Lely Method, Polytype, Stacking Fault
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