Paper Title:
Improved Epitaxy of Cubic SiC Thin Films on Si(111) by Solid-Source MBE
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
255-258
DOI
10.4028/www.scientific.net/MSF.264-268.255
Citation
A. Fissel, K. Pfennighaus, U. Kaiser, J. Kräußlich, H. Hobert, B. Schröter, W. Richter, "Improved Epitaxy of Cubic SiC Thin Films on Si(111) by Solid-Source MBE", Materials Science Forum, Vols. 264-268, pp. 255-258, 1998
Online since
February 1998
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Price
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