Paper Title:
Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
359-362
DOI
10.4028/www.scientific.net/MSF.264-268.359
Citation
M. Kanaya, H. Yashiro, N. Ohtani, M. Katsuno, J. Takahashi, S. Shinoyama, "Characterization of Mechanically Polished Surfaces of Single Crystalline 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 359-362, 1998
Online since
February 1998
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Price
$32.00
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