Paper Title:
Surface Morphology Improvement of SiC Epitaxy by Sacrificial Oxidation
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
367-370
DOI
10.4028/www.scientific.net/MSF.264-268.367
Citation
C.J. Anthony, A.J. Pidduck, M. J. Uren, "Surface Morphology Improvement of SiC Epitaxy by Sacrificial Oxidation", Materials Science Forum, Vols. 264-268, pp. 367-370, 1998
Online since
February 1998
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Price
$32.00
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