Paper Title:
Transmission Electron Microscopy Investigation of Defects in B-Implanted 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
413-416
DOI
10.4028/www.scientific.net/MSF.264-268.413
Citation
P.O.Å. Persson, Q. Wahab, L. Hultman, N. Nordell, A. Schöner, K. Rottner, E. Olsson, M. K. Linnarsson, "Transmission Electron Microscopy Investigation of Defects in B-Implanted 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 413-416, 1998
Online since
February 1998
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Price
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