Paper Title:
The Origin of Triangular Surface Defects in 4H-SiC CVD Epilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
417-420
DOI
10.4028/www.scientific.net/MSF.264-268.417
Citation
W.L. Zhou, P. Pirouz, J. A. Powell, "The Origin of Triangular Surface Defects in 4H-SiC CVD Epilayers", Materials Science Forum, Vols. 264-268, pp. 417-420, 1998
Online since
February 1998
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Price
$32.00
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