Paper Title:
Distribution of Paramagnetic Defects in 3C-SiC Epitaxial Films Grown by LPCVD Method with Alternate Gas Supply
  Abstract

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Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
619-622
DOI
10.4028/www.scientific.net/MSF.264-268.619
Citation
T. Izumi, K. Kobayashi, E. Hirosawa, T. Kawahara, H. Nagasawa, "Distribution of Paramagnetic Defects in 3C-SiC Epitaxial Films Grown by LPCVD Method with Alternate Gas Supply", Materials Science Forum, Vols. 264-268, pp. 619-622, 1998
Online since
February 1998
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