Paper Title:
The Measurement of the Thickness of Thin SiC Layers on Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
641-644
DOI
10.4028/www.scientific.net/MSF.264-268.641
Citation
V. Cimalla, J. Scheiner, G. Ecke, M. Friedrich, R. Goldhahn, D.R.T. Zahn, J. Pezoldt, "The Measurement of the Thickness of Thin SiC Layers on Silicon", Materials Science Forum, Vols. 264-268, pp. 641-644, 1998
Online since
February 1998
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Price
$32.00
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