Paper Title:
Thickness Contour Mapping of SiC Epi-Films on SiC Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
645-648
DOI
10.4028/www.scientific.net/MSF.264-268.645
Citation
M. F. MacMillan, P.O. Narfgren, A. Henry, E. Janzén, "Thickness Contour Mapping of SiC Epi-Films on SiC Substrates", Materials Science Forum, Vols. 264-268, pp. 645-648, 1998
Online since
February 1998
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Price
$32.00
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