Paper Title:
Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-implantation
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
689-692
DOI
10.4028/www.scientific.net/MSF.264-268.689
Citation
K. Tone, S.R. Weiner, J. H. Zhao, "Electrical Characterization of p-Type 6H-SiC Layers Created by C and Al Co-implantation", Materials Science Forum, Vols. 264-268, pp. 689-692, 1998
Online since
February 1998
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Price
$32.00
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