Paper Title:
Energy Order Effect of Aluminium Multiple Implantation in 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
697-700
DOI
10.4028/www.scientific.net/MSF.264-268.697
Citation
L. Ottaviani, E. Morvan, M. L. Locatelli, P. Godignon, J.-P. Chante, "Energy Order Effect of Aluminium Multiple Implantation in 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 697-700, 1998
Online since
February 1998
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Price
$32.00
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