Paper Title:
Implantation of Al and B Acceptors into Alpha-SiC and pn Junction Diodes
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
701-704
DOI
10.4028/www.scientific.net/MSF.264-268.701
Citation
O. Takemura, T. Kimoto, H. Matsunami, T. Nakata, M. Watanabe, M. Inoue, "Implantation of Al and B Acceptors into Alpha-SiC and pn Junction Diodes", Materials Science Forum, Vols. 264-268, pp. 701-704, 1998
Online since
February 1998
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Price
$32.00
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