Paper Title:
Post-Implantation Annealing of Aluminium in 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
709-712
DOI
10.4028/www.scientific.net/MSF.264-268.709
Citation
L. Ottaviani, D. Planson, M. L. Locatelli, J.-P. Chante, B. Canut, S. Ramos, "Post-Implantation Annealing of Aluminium in 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 709-712, 1998
Online since
February 1998
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Price
$32.00
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