Paper Title:
The Characterization of SiC Hot-Implanted with Ga +
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
713-716
DOI
10.4028/www.scientific.net/MSF.264-268.713
Citation
Y. Tanaka, N. Kobayashi, M. Hasegawa, S. Yoshida, Y. Ishida, T. Nishijima, N. Hayashi, "The Characterization of SiC Hot-Implanted with Ga +", Materials Science Forum, Vols. 264-268, pp. 713-716, 1998
Online since
February 1998
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Price
$32.00
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