Paper Title:
Hot-Implantation of Phosphorus Ions into 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
721-724
DOI
10.4028/www.scientific.net/MSF.264-268.721
Citation
L. Bouwhuis, T. Ohshima, H. Itoh, Y. Aoki, M. Yoshikawa, I. Nashiyama, M. Iwami, "Hot-Implantation of Phosphorus Ions into 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 721-724, 1998
Online since
February 1998
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Price
$32.00
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