Paper Title:
Investigation of Ion-Impantation Induced Damage in 6H-SiC by RSB/C and PAS
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
729-732
DOI
10.4028/www.scientific.net/MSF.264-268.729
Citation
H. Wirth, W. Anwand, G. Brauer, M. Voelskow, D. Panknin, W. Skorupa, P. G. Coleman, "Investigation of Ion-Impantation Induced Damage in 6H-SiC by RSB/C and PAS", Materials Science Forum, Vols. 264-268, pp. 729-732, 1998
Online since
February 1998
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Price
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