Paper Title:
Analysis of Aluminium Ion Implantation Damage into 6H-SiC Epilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
733-736
DOI
10.4028/www.scientific.net/MSF.264-268.733
Citation
N. Mestres, M. Ben El Mekki, F.J. Campos, J. Pascual, E. Morvan, P. Godignon, J. Millan, G. Lulli, "Analysis of Aluminium Ion Implantation Damage into 6H-SiC Epilayers", Materials Science Forum, Vols. 264-268, pp. 733-736, 1998
Online since
February 1998
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Price
$32.00
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