Paper Title:
Ion Beam Synthesis: A Novel Method of Producing (SiC)1-x(AIN)x Layers
| Periodical |
Materials Science Forum (Volumes 264 - 268)
|
| Main Theme |
Silicon Carbide, III-Nitrides and Related Materials
|
| Edited by |
G. Pensl, H. Morkoç, B. Monemar and E. Janzén |
| Pages |
753-756 |
| DOI |
10.4028/www.scientific.net/MSF.264-268.753 |
| Citation |
R.A. Yankov et al., 1998, Materials Science Forum, 264-268, 753 |
| Online since |
February, 1998 |
| Authors |
R.A. Yankov, W. Fukarek, M. Voelskow, Jörg Pezoldt, Wolfgang Skorupa |
| Keywords |
Buried Layers, Damage, Dynamic Annealing, Ion Implantation |
| Price |
US$ 28,- |