Paper Title:

Ion Beam Synthesis: A Novel Method of Producing (SiC)1-x(AIN)x Layers

Periodical Materials Science Forum (Volumes 264 - 268)
Main Theme Silicon Carbide, III-Nitrides and Related Materials
Edited by G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages 753-756
DOI 10.4028/www.scientific.net/MSF.264-268.753
Citation R.A. Yankov et al., 1998, Materials Science Forum, 264-268, 753
Online since February, 1998
Authors R.A. Yankov, W. Fukarek, M. Voelskow, Jörg Pezoldt, Wolfgang Skorupa
Keywords Buried Layers, Damage, Dynamic Annealing, Ion Implantation
Price US$ 28,-
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