Paper Title:
Ion Beam Synthesis: A Novel Method of Producing (SiC)1-x(AIN)x Layers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
753-756
DOI
10.4028/www.scientific.net/MSF.264-268.753
Citation
R.A. Yankov, W. Fukarek, M. Voelskow, J. Pezoldt, W. Skorupa, "Ion Beam Synthesis: A Novel Method of Producing (SiC)1-x(AIN)x Layers", Materials Science Forum, Vols. 264-268, pp. 753-756, 1998
Online since
February 1998
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Price
$32.00
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