Paper Title:
Silicon Carbide on Insulator Formation by the Smart CUT® Process
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
765-770
DOI
10.4028/www.scientific.net/MSF.264-268.765
Citation
L. Di Cioccio, Y. Le Tiec, C. Jaussaud, E. Hugonnard-Bruyère, M. Bruel, "Silicon Carbide on Insulator Formation by the Smart CUT® Process", Materials Science Forum, Vols. 264-268, pp. 765-770, 1998
Online since
February 1998
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Price
$32.00
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