Paper Title:
Delamination of Thin Layers in H+ Implanted Silicon Carbide
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
771-774
DOI
10.4028/www.scientific.net/MSF.264-268.771
Citation
T. Hara, Y. Kakizaki, H. Tanaka, M. Inoue, K. Kajiyama, T. Yoneda, K. Sekine, K. Masao, "Delamination of Thin Layers in H+ Implanted Silicon Carbide", Materials Science Forum, Vols. 264-268, pp. 771-774, 1998
Online since
February 1998
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Price
$32.00
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