Paper Title:
Metal Disilicide Contacts to 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
775-778
DOI
10.4028/www.scientific.net/MSF.264-268.775
Citation
J. Kriz, T. Scholz, K. Gottfried, J. Leibelt, C. Kaufmann, T. Gessner, "Metal Disilicide Contacts to 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 775-778, 1998
Online since
February 1998
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Price
$32.00
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