Paper Title:
Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
779-782
DOI
10.4028/www.scientific.net/MSF.264-268.779
Citation
K. Nakashima, O. Eryu, T. Kume, T. Nakata, M. Inoue, "Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes", Materials Science Forum, Vols. 264-268, pp. 779-782, 1998
Online since
February 1998
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Price
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