Paper Title:
Thermal Stability of Sputtered TiN as Metal Gate on 4H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
805-808
DOI
10.4028/www.scientific.net/MSF.264-268.805
Citation
E. Danielsson, C. I. Harris, C. M. Zetterling, M. Östling, "Thermal Stability of Sputtered TiN as Metal Gate on 4H-SiC", Materials Science Forum, Vols. 264-268, pp. 805-808, 1998
Online since
February 1998
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Price
$35.00
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