Paper Title:
Sputter-Etching as a Surface Preparation Technique for Schottky Contacts
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
821-824
DOI
10.4028/www.scientific.net/MSF.264-268.821
Citation
S. I. Kinouchi, H. Sugimoto, Y. Tarui, K. Ohtsuka, T. Takami, T. Ozeki, "Sputter-Etching as a Surface Preparation Technique for Schottky Contacts", Materials Science Forum, Vols. 264-268, pp. 821-824, 1998
Online since
February 1998
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Price
$32.00
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