Paper Title:
Electrical Properties and Reliability of Vapor Jet Deposited Oxide on SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
865-868
DOI
10.4028/www.scientific.net/MSF.264-268.865
Citation
X. W. Wang, Y. Takahashi, T.P. Ma, G.J. Cui, T. Tamagawa, B. Halpern, J.J. Schmitt, "Electrical Properties and Reliability of Vapor Jet Deposited Oxide on SiC", Materials Science Forum, Vols. 264-268, pp. 865-868, 1998
Online since
February 1998
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Price
$32.00
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