Paper Title:
Metal-Nitride-Semiconductor Capacitors on 6H-SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
881-884
DOI
10.4028/www.scientific.net/MSF.264-268.881
Citation
S. Berberich, P. Godignon, J. Millan, D. Planson, H.L. Hartnagel, A. Senes, "Metal-Nitride-Semiconductor Capacitors on 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 881-884, 1998
Online since
February 1998
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Price
$32.00
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