Paper Title:
Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
885-888
DOI
10.4028/www.scientific.net/MSF.264-268.885
Citation
A.J. Fleischman, X. Wei, C. A. Zorman, M. Mehregany, "Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD", Materials Science Forum, Vols. 264-268, pp. 885-888, 1998
Online since
February 1998
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Price
$32.00
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