Paper Title:
Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
889-894
DOI
10.4028/www.scientific.net/MSF.264-268.889
Citation
A.J. Fleischman, S. Roy, C. A. Zorman, M. Mehregany, "Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures", Materials Science Forum, Vols. 264-268, pp. 889-894, 1998
Online since
February 1998
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Price
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