Silicon Carbide, III-Nitrides and Related Materials
Materials Science Forum Volumes 264 - 268
doi:10.4028/www.scientific.net/MSF.264-268
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p127
Homoepitaxial Growth of 4H- and 6H-SiC in a Commercial Horizontal LPCVD Reactor
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208 K
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Authors: Frank Wischmeyer, D. Leidich, E. Niemann
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p131
Growth of 4H and 6H SiC Trenches and Around Stripe Mesas
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222 K
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Authors: Nils Nordell, S. Karlsson, Andrey O. Konstantinov
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p135
Planar 6H-SiC p-n Junctions Prepared by Selective Epitaxial Growth
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331 K
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Authors: Kai Christiansen, T. Dalibor, Reinhard Helbig, S. Christiansen, Horst P. Strunk
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p139
Epitaxial Growth of SiC on α-SiC Using Si2Cl6+C3H8+H2 System
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325 K
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Authors: Shigehiro Nishino, Toshiyuki Miyanagi, Y. Nishio
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p143
High Growth Rate of α-SiC by Sublimation Epitaxy
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424 K
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Authors: Mikael Syväjärvi, Rositza Yakimova, Mike F. MacMillan, M. Tuominen, A. Kakanakova-Georgieva, Carl G. Hemmingsson, Ivan G. Ivanov, Erik Janzén
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p147
The Effects of Growth Conditions in Dislocation Density in SiC Epi-Layers Produced by the Sublimation Epitaxy Technique
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218 K
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Authors: A. Kakanakova-Georgieva, Mike F. MacMillan, Shigehiro Nishino, Rositza Yakimova, Erik Janzén
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p151
Domain Occurance in SiC Epitaxial Layers Grown by Sublimation
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227 K
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Authors: M. Tuominen, Rositza Yakimova, A. Kakanakova-Georgieva, Mike F. MacMillan, Mikael Syväjärvi, Erik Janzén
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p155
Epitaxy of High Quality SiC Layers by CST
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283 K
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Authors: Takeru Yoshida, Y. Nishio, S.K. Lilov, Shigehiro Nishino
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p159
Wetting Properties and Interfacial Energies in Liquid Phase Growth of α-SiC
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236 K
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Authors: Rositza Yakimova, Mikael Syväjärvi, Erik Janzén
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p163
High Quality 6H- and 4H-SiC pn Structures with Stable Electric Breakdown Grown by Liquid Phase Epitaxy
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225 K
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Authors: S.V. Rendakova, V. Ivantsov, Vladimir Dmitriev
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p167
Thick Film SiC Epitaxy for 'Filling Up' Micropipes
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326 K
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Authors: I.I. Khlebnikov, V. Madangarli, M.A. Khan, Tangali S. Sudarshan
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p171
A New Radiation Heated 4 Inch LPCVD System for β-SiC Heteroepitaxy
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221 K
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Authors: H. Möller, W. Legner, G. Krötz
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p175
Epitaxial Growth in 3C-SiC without Carbonization Process Using 1,3-Disilabutane
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209 K
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Authors: Kyung Won Lee, K.-S. Yu, Joon Woo Bae, Y. Kim
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p179
Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence
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213 K
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Authors: Chien-Hung Wu, A.J. Fleischman, Christian A. Zorman, Mehran Mehregany
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p183
CVD Growth Mechanism of 3C-SiC on Si Substrates
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358 K
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Authors: Yuuki Ishida, Tetsuo Takahashi, Hajime Okumura, Sadafumi Yoshida, Toshihiro Sekigawa