Paper Title:
Modeling of Growth Processes in Epitaxial Reactors
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 276-277)
Edited by
R. Fornari and C. Paorici
Pages
135-152
DOI
10.4028/www.scientific.net/MSF.276-277.135
Citation
S. Carrà, C. Cavallotti, M. Masi, "Modeling of Growth Processes in Epitaxial Reactors", Materials Science Forum, Vols. 276-277, pp. 135-152, 1998
Online since
March 1998
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Price
$32.00
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