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Principles of VPE and MOVPE and Applications

Journal Materials Science Forum (Volumes 276 - 277)
Volume Theoretical and Technological Aspects of Crystal Growth
Edited by R. Fornari and C. Paorici
Pages 153-174
DOI 10.4028/www.scientific.net/MSF.276-277.153
Authors N. Lovergine
Keywords Metalorganic Vapor Phase Epitaxy, Semiconductor, Vapor-Phase Epitaxy (VPE)
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