Paper Title:
Structure of Reactively Sputtered Ta-N-O Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 278-281)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
466-471
DOI
10.4028/www.scientific.net/MSF.278-281.466
Citation
N. Mattern, M. Stavrev, D. Fischer, "Structure of Reactively Sputtered Ta-N-O Films", Materials Science Forum, Vols. 278-281, pp. 466-471, 1998
Online since
April 1998
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Price
$32.00
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