Investigations of TiN Films Optical and Mechanical Characteristics |
| Journal |
Materials Science Forum (Volumes 282 - 283) |
| Volume |
Advanced Materials and Processes |
| Edited by |
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic |
| Pages |
139-146 |
| DOI |
10.4028/www.scientific.net/MSF.282-283.139 |
| Citation |
M. Zlatanović et al., 1998, Materials Science Forum, 282-283, 139 |
| Authors |
M. Zlatanović, D. Šešum, Dj. Djukić, N. Popović |
| Keywords |
Magnetron Sputtering, Mechanical Characteristic, Optical Characteristics, Titanium Nitride TiN |
| Full Paper |
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