Paper Title:
Nonequilibrium Plasmas for Material Processing in Microelectronics
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 282-283)
Edited by
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic
Pages
47-56
DOI
10.4028/www.scientific.net/MSF.282-283.47
Citation
Z.L. Petrović, T. Makabe, "Nonequilibrium Plasmas for Material Processing in Microelectronics", Materials Science Forum, Vols. 282-283, pp. 47-56, 1998
Online since
May 1998
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Price
$32.00
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