Paper Title:
Critical Parameters of Si Conversion into Si3N4 Nanophase Powder for Plasma Process
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 282-283)
Edited by
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic
Pages
57-64
DOI
10.4028/www.scientific.net/MSF.282-283.57
Citation
P.L. Stefanović, P.B. Pavlovic, Ž.G. Kostić, S. Šikmanović, D. Cvetinović, "Critical Parameters of Si Conversion into Si3N4 Nanophase Powder for Plasma Process", Materials Science Forum, Vols. 282-283, pp. 57-64, 1998
Online since
May 1998
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Price
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