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Trends and New Applications of Thin Films

Materials Science Forum Volumes 287 - 288

• Papers
• Abstracts

• p3 Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry   [ 659 K ]
  Authors: P. Awakowicz
• p23 Crystallography and Microstructure of Thin Films Studied by X-Ray and Electron Diffraction   [ 2 M ]
  Authors: Robert A. Schwarzer
• p61 Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques   [ 1 M ]
  Authors: A. Wucher
• p87 The Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal Displays   [ 522 K ]
  Authors: E. Lueder
• p97 Doping Diamonds and Diamond Films for Electronic Applications   [ 538 K ]
  Authors: R. Kalish
• p107 Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films   [ 441 K ]
  Authors: A. Billard, C. Frantz
• p119 Fabrication of Micro- and Nanostructures   [ 814 K ]
  Authors: R. Kassing
• p131 Modelling of PVC Processes   [ 582 K ]
  Authors: J. Machet, C. Gautier-Picard, P. Cledat, O. Piot
• p141 Real Time Optical Method of Stress Measurements in Thin Films   [ 298 K ]
  Authors: G. Moulard, G. Contoux, G. Motyl, M. Courbon
• p151 Spectroellipsometric Method for Process Monitoring of Semiconductor Thin Films and Interfaces   [ 353 K ]
  Authors: R. Brenot, Morten Kildemo, B. Drévillon
• p159 Giant Magnetoresistive Sensors for Industrial Applications   [ 415 K ]
  Authors: J. Wecker, W. Clemens, E. Hufgard
• p169 Bioactive Films   [ 509 K ]
  Authors: A. Hengerer, E. Prohaska, J. Decker, S. Hauck, E. Yacoub, S. Kößlinger, U. Reischl, S. Drost, Herbert Wolf
• p181 In-Situ Control of Stoichiometry in Room Temperature MBE-Growth of ZrO₂ Thin Films Using a Novel Hyperthermal Oxygen Atom Source   [ 181 K ]
  Authors: E. Wisotzki, Horst Hahn, G.B. Hoflund
• p185 Surface Analysis of Hard Coatings Deposited by Modified Pulse Arc Process   [ 216 K ]
  Authors: K. Keutel, H. Fuchs, Ch. Edelmann, H. Mecke
• p189 High Rate Deposition of Thick Oxide Layers on Plastic Substrates   [ 268 K ]
  Authors: H. Morgner, M. Neumann, M. Krug, S. Straach