Materials Science Forum

Paper Title	Page
Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry Authors: P. Awakowicz	3
Crystallography and Microstructure of Thin Films Studied by X-Ray and Electron Diffraction Authors: Robert A. Schwarzer	23
Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques Authors: A. Wucher	61
The Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal Displays Authors: E. Lueder	87
Doping Diamonds and Diamond Films for Electronic Applications Authors: R. Kalish	97
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films Authors: A. Billard, C. Frantz	107
Fabrication of Micro- and Nanostructures Authors: R. Kassing	119
Modelling of PVC Processes Authors: J. Machet, C. Gautier-Picard, P. Cledat, O. Piot	131
Real Time Optical Method of Stress Measurements in Thin Films Authors: G. Moulard, G. Contoux, G. Motyl, M. Courbon	141
Spectroellipsometric Method for Process Monitoring of Semiconductor Thin Films and Interfaces Authors: R. Brenot, Morten Kildemo, B. Drévillon	151

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Main Themes

Trends and New Applications of Thin Films