Trends and New Applications of Thin Films
| Paper Title | Page |
|---|---|
|
Authors: P. Awakowicz |
3 |
|
Crystallography and Microstructure of Thin Films Studied by X-Ray and Electron Diffraction Authors: Robert A. Schwarzer |
23 |
|
Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques Authors: A. Wucher |
61 |
|
The Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal Displays Authors: E. Lueder |
87 |
|
Doping Diamonds and Diamond Films for Electronic Applications Authors: R. Kalish |
97 |
|
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films Authors: A. Billard, C. Frantz |
107 |
|
Fabrication of Micro- and Nanostructures Authors: R. Kassing |
119 |
|
Authors: J. Machet, C. Gautier-Picard, P. Cledat, O. Piot |
131 |
|
Real Time Optical Method of Stress Measurements in Thin Films Authors: G. Moulard, G. Contoux, G. Motyl, M. Courbon |
141 |
|
Spectroellipsometric Method for Process Monitoring of Semiconductor Thin Films and Interfaces Authors: R. Brenot, Morten Kildemo, B. Drévillon |
151 |