Paper Title:
Fabrication of Micro- and Nanostructures
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 287-288)
Edited by
Horst Hoffmann
Pages
119-130
DOI
10.4028/www.scientific.net/MSF.287-288.119
Citation
R. Kassing, "Fabrication of Micro- and Nanostructures", Materials Science Forum, Vols. 287-288, pp. 119-130, 1998
Online since
August 1998
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Price
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