Fabrication of Micro- and Nanostructures |
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| Journal | Materials Science Forum (Volumes 287 - 288) |
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| Volume | Trends and New Applications of Thin Films |
| Edited by | Horst Hoffmann |
| Pages | 119-130 |
| DOI | 10.4028/www.scientific.net/MSF.287-288.119 |
| Authors | R. Kassing |
| Keywords | Fabrication, Microstructure, Nano-Structure |
| Full Paper | 
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