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Fabrication of Micro- and Nanostructures

Journal Materials Science Forum (Volumes 287 - 288)
Volume Trends and New Applications of Thin Films
Edited by Horst Hoffmann
Pages 119-130
DOI 10.4028/www.scientific.net/MSF.287-288.119
Citation R. Kassing, 1998, Materials Science Forum, 287-288, 119
Authors R. Kassing
Keywords Fabrication, Microstructure, Nano Structure
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