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Modelling of PVC Processes

Journal Materials Science Forum (Volumes 287 - 288)
Volume Trends and New Applications of Thin Films
Edited by Horst Hoffmann
Pages 131-140
DOI 10.4028/www.scientific.net/MSF.287-288.131
Citation J. Machet et al., 1998, Materials Science Forum, 287-288, 131
Authors J. Machet, C. Gautier-Picard, P. Cledat, O. Piot
Keywords Ion Plating, Magnetron Sputtering, PVC Processes, Vacuum Arc Evaporation, Vacuum Evaporation
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