Real Time Optical Method of Stress Measurements in Thin Films |
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| Journal | Materials Science Forum (Volumes 287 - 288) |
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| Volume | Trends and New Applications of Thin Films |
| Edited by | Horst Hoffmann |
| Pages | 141-150 |
| DOI | 10.4028/www.scientific.net/MSF.287-288.141 |
| Citation | G. Moulard et al., 1998, Materials Science Forum, 287-288, 141 |
| Authors | G. Moulard, G. Contoux, G. Motyl, M. Courbon |
| Keywords | Cantilever, Image Processing, Intrinsic Stress, Stress |
| Full Paper | 
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