In-Situ Control of Stoichiometry in Room Temperature MBE-Growth of ZrO2 Thin Films Using a Novel Hyperthermal Oxygen Atom Source |
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| Journal | Materials Science Forum (Volumes 287 - 288) |
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| Volume | Trends and New Applications of Thin Films |
| Edited by | Horst Hoffmann |
| Pages | 181-184 |
| DOI | 10.4028/www.scientific.net/MSF.287-288.181 |
| Citation | E. Wisotzki et al., 1998, Materials Science Forum, 287-288, 181 |
| Authors | E. Wisotzki, Horst Hahn, G.B. Hoflund |
| Keywords | Atomic Oxygen, Electron Stimulated Desorption, Oxide Thin Films, Zro2 |
| Full Paper | 
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